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About usProvider of large-scale manufacturing system solutions, builder of key equipment
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Products & Technology
PRODUCTS CENTER
This equipment is a semiconductor turnaround wafer box cleaning equipment, which can realize automatic brushing, cleaning, and blow-drying of wafer boxes.
The equipment is divided into two specifications: standard type and clean type, which can be applied to the production workshop of the semiconductor gray area and clean area respectively, combined with robot, lifter and other equipment to realize automatic material handling on the ground or in the air.
This equipment is a clean high-density storage equipment, which is often used for temporary storage of FOUP and other materials in semiconductor dust-free workshops, and can be flexibly connected to a variety of automation equipment, such as OHT, AMR, conveyor, robot, etc., to achieve rapid storage at the line edge.
This equipment is a semiconductor quartz tube cleaning equipment, which can realize the automatic handling, pickling, washing, blow-drying, automatic liquid dispensing, and automatic replenishment of quartz tubes, and can meet the cleaning needs of quartz tubes, quartz boats, and SiC furnace tubes of various specifications.
Address
No.1, Huake Street, Huayuan Industrial Park, Binhai High-tech Zone, Tianjin
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