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Etching Area Automatic Loading & Unloading System
Etching Area Automatic Loading & Unloading System
Products
This system is designed and manufactured for the semiconductor substrate factory chamfering process automatic loading and unloading equipment, including the chamfering area before and after the three-dimensional library, air conveyor system, ground rail robot system, etc., to replace the manual loading and unloading mode of operation, and before and after the process of automation, digitalization, information management and control.
Product Features
The whole system takes wafer cassette as a unit to realize semiconductor wafer assembly, caching and batch processing;
Compared with the semiconductor traditional OHT, stoker, conveyor, RGV and other automation equipment, the system can realize the compatible handling of multi-size cassette, and the number of line-side cache and the handling speed have a greater advantage, to achieve cost reduction and efficiency;
Replacing manual labor to realize the functions of chamfering process such as cache assembly, processing by batch, automatic loading and unloading;
Through the interconnection with EAP and MES system, it can realize automatic data collection and control.
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劲旅环境
Products
This system is designed and manufactured for the semiconductor substrate factory chamfering process automatic loading and unloading equipment, including the chamfering area before and after the three-dimensional library, air conveyor system, ground rail robot system, etc., to replace the manual loading and unloading mode of operation, and before and after the process of automation, digitalization, information management and control.
Product Features
The whole system takes wafer cassette as a unit to realize semiconductor wafer assembly, caching and batch processing;
Compared with the semiconductor traditional OHT, stoker, conveyor, RGV and other automation equipment, the system can realize the compatible handling of multi-size cassette, and the number of line-side cache and the handling speed have a greater advantage, to achieve cost reduction and efficiency;
Replacing manual labor to realize the functions of chamfering process such as cache assembly, processing by batch, automatic loading and unloading;
Through the interconnection with EAP and MES system, it can realize automatic data collection and control.
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