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About usProvider of large-scale manufacturing system solutions, builder of key equipment
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Post Polishing Cleaning Machine
Post Polishing Cleaning Machine
Product Introduction
This equipment is a cleaning equipment after polishing the edge of semiconductor wafers, which adopts the method of basketless cleaning to achieve pickling, alkali washing, hot water slow lifting and IR (infrared) drying after wafer edge polishing, effectively removing grinding particles, removing polishing fluid residue, and preventing particle re-adsorption.
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Product Introduction
This equipment is a cleaning equipment after polishing the edge of semiconductor wafers, which adopts the method of basketless cleaning to achieve pickling, alkali washing, hot water slow lifting and IR (infrared) drying after wafer edge polishing, effectively removing grinding particles, removing polishing fluid residue, and preventing particle re-adsorption.
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No.1, Huake Street, Huayuan Industrial Park, Binhai High-tech Zone, Tianjin
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